{"id":6157,"date":"2026-09-16T14:37:27","date_gmt":"2026-09-16T12:37:27","guid":{"rendered":"https:\/\/measline.com\/?post_type=project&#038;p=6157"},"modified":"2026-09-16T14:37:28","modified_gmt":"2026-09-16T12:37:28","slug":"deposition-system-thermal-evaporators-magnetrons","status":"publish","type":"project","link":"https:\/\/measline.com\/index.php\/en-gb\/project\/deposition-system-thermal-evaporators-magnetrons\/","title":{"rendered":"Thin-layer deposition system with thermal evaporators and magnetrons"},"content":{"rendered":"\n[et_pb_section fb_built=&#8221;1&#8243; _builder_version=&#8221;4.16&#8243; _module_preset=&#8221;default&#8221; background_color=&#8221;rgba(0,0,0,0.05)&#8221; custom_margin=&#8221;0px|0px|0px|0px|false|false&#8221; custom_padding=&#8221;0px|0px|0px|0px|false|false&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_row column_structure=&#8221;1_2,1_2&#8243; _builder_version=&#8221;4.16&#8243; _module_preset=&#8221;default&#8221; custom_margin=&#8221;0px||0px||true|false&#8221; custom_padding=&#8221;11px||3px||false|false&#8221; locked=&#8221;off&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_column type=&#8221;1_2&#8243; _builder_version=&#8221;4.16&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_button button_url=&#8221;@ET-DC@eyJkeW5hbWljIjp0cnVlLCJjb250ZW50IjoicG9zdF9saW5rX3VybF9wYWdlIiwic2V0dGluZ3MiOnsicG9zdF9pZCI6IjQ0MzkifX0=@&#8221; button_text=&#8221;Back to all projects&#8221; _builder_version=&#8221;4.22.1&#8243; _dynamic_attributes=&#8221;button_url&#8221; _module_preset=&#8221;default&#8221; custom_button=&#8221;on&#8221; button_text_color=&#8221;#225500&#8243; button_border_width=&#8221;0px&#8221; button_icon=&#8221;&#x4a;||divi||400&#8243; locked=&#8221;off&#8221; global_colors_info=&#8221;{}&#8221;][\/et_pb_button][\/et_pb_column][et_pb_column type=&#8221;1_2&#8243; _builder_version=&#8221;4.17.0&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_button button_url=&#8221;@ET-DC@eyJkeW5hbWljIjp0cnVlLCJjb250ZW50IjoicG9zdF9saW5rX3VybF9wYWdlIiwic2V0dGluZ3MiOnsicG9zdF9pZCI6IjQ1MTMifX0=@&#8221; button_text=&#8221;Thin layer deposition systems&#8221; _builder_version=&#8221;4.22.1&#8243; _dynamic_attributes=&#8221;button_url&#8221; _module_preset=&#8221;default&#8221; custom_button=&#8221;on&#8221; button_text_color=&#8221;#225500&#8243; button_border_width=&#8221;0px&#8221; button_icon=&#8221;&#x4a;||divi||400&#8243; locked=&#8221;off&#8221; global_colors_info=&#8221;{}&#8221;][\/et_pb_button][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=&#8221;1&#8243; _builder_version=&#8221;4.16&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_row column_structure=&#8221;1_2,1_2&#8243; _builder_version=&#8221;4.16&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_column type=&#8221;1_2&#8243; _builder_version=&#8221;4.16&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_image src=&#8221;https:\/\/measline.com\/wp-content\/uploads\/2026\/09\/IMG_20260822_145417978_HDR-scaled.jpg&#8221; alt=&#8221;Img 20260822 145417978 Hdr&#8221; title_text=&#8221;Img 20260822 145417978 Hdr&#8221; _builder_version=&#8221;4.27.8&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;][\/et_pb_image][et_pb_image src=&#8221;https:\/\/measline.com\/wp-content\/uploads\/2026\/09\/IMG_20260822_155216929_HDR-scaled.jpg&#8221; alt=&#8221;System nanoszenia warstw z kontrolerami&#8221; title_text=&#8221;System nanoszenia warstw z kontrolerami&#8221; _builder_version=&#8221;4.27.8&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;][\/et_pb_image][\/et_pb_column][et_pb_column type=&#8221;1_2&#8243; _builder_version=&#8221;4.16&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_text _builder_version=&#8221;4.16.1&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;]<h1><strong>Thin-layer deposition system with thermal evaporators and magnetrons<\/strong><\/h1>[\/et_pb_text][et_pb_divider color=&#8221;#215500&#8243; divider_weight=&#8221;2px&#8221; _builder_version=&#8221;4.16&#8243; _module_preset=&#8221;default&#8221; custom_margin=&#8221;-23px||6px||false|false&#8221; global_colors_info=&#8221;{}&#8221;][\/et_pb_divider][et_pb_text _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; custom_padding=&#8221;2px||0px|||&#8221; global_colors_info=&#8221;{}&#8221;]<p data-start=\"0\" data-end=\"423\" class=\"PDq2pG_selectionAnchorContainer\">The configuration of three vacuum chambers integrated into a single vacuum system is designed for the deposition of thin films of metallic, ceramic, and organic materials using <strong data-start=\"177\" data-end=\"200\">thermal evaporators<\/strong> and <strong data-start=\"205\" data-end=\"226\">magnetron sources<\/strong>. The system is equipped with a load-lock chamber and two rectangular deposition chambers, together with linear-rotary transfer mechanisms designed to transfer sample carriers between the chambers.<span aria-hidden=\"true\" class=\"PDq2pG_selectionAnchor\"><\/span><\/p>\n<p data-start=\"425\" data-end=\"716\">The system has been manufactured to UHV (Ultra-High Vacuum) standards. Due to the system configuration, the thermal deposition chamber allows for the installation of up to four thermal evaporators. Similarly, the magnetron deposition chamber can accommodate up to four magnetron sources.<\/p>\n<p data-start=\"718\" data-end=\"1104\">The uniformity of the deposited films is ensured by the use of <strong data-start=\"781\" data-end=\"798\">rotary tables<\/strong>, providing continuous rotation of the sample carrier during evaporation. In addition, the table is equipped with sample heating and temperature stabilization capabilities in the range of <strong data-start=\"986\" data-end=\"1015\">room temperature to 400\u00b0C<\/strong>. The sample heating and rotation station is additionally equipped with a sample shutter.<\/p>\n<p data-start=\"1106\" data-end=\"1625\">The sample carrier with the samples is transferred from the load-lock chamber to the thermal deposition chamber or to the magnetron chamber using a <strong data-start=\"1226\" data-end=\"1255\">linear transfer mechanism<\/strong>, ensuring that the vacuum level in the deposition chamber does not undergo significant changes during sample transfer. Once the sample carrier has been mounted in the load-lock chamber holder, the load-lock chamber can be evacuated to the required vacuum level, after which the isolation valve separating the load-lock chamber from the deposition chamber can be opened.<\/p>\n<p data-start=\"1627\" data-end=\"1867\">The deposition chambers are designed to accommodate a sample carrier capable of holding samples with a maximum size of <strong data-start=\"1746\" data-end=\"1760\">50 \u00d7 50 mm<\/strong>. At the same time, the use of an appropriate mask allows a larger number of smaller samples to be mounted.<\/p>\n<p data-start=\"1869\" data-end=\"2079\" data-is-last-node=\"\" data-is-only-node=\"\">The operation of the system, including pressure level control, operation of the pumping system, shutter control, and thin-film deposition processes, is fully automated and controlled via dedicated software.<\/p>[\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=&#8221;1&#8243; _builder_version=&#8221;4.16&#8243; _module_preset=&#8221;default&#8221; background_color=&#8221;rgba(0,0,0,0.05)&#8221; width=&#8221;100%&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_row column_structure=&#8221;1_2,1_2&#8243; admin_label=&#8221;Wiersz&#8221; _builder_version=&#8221;4.16.0&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_column type=&#8221;1_2&#8243; _builder_version=&#8221;4.16&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_text _builder_version=&#8221;4.16.0&#8243; _module_preset=&#8221;default&#8221; custom_margin=&#8221;-50px||||false|false&#8221; custom_padding=&#8221;17px||3px||false|false&#8221; global_colors_info=&#8221;{}&#8221;]<div><\/div>\n<div><\/div>\n<div>\n<h3 class=\"western\"><span>The most significant device features:<\/span><\/h3>\n<div class=\"flex max-w-full flex-col gap-4 grow\">\n<div data-message-author-role=\"assistant\" data-message-id=\"12b19273-ac35-4087-8118-8b34d358ee4a\" dir=\"auto\" data-message-model-slug=\"gpt-5-6\" class=\"min-h-8 text-message relative flex w-full flex-col items-end gap-2 text-start break-words whitespace-normal outline-none keyboard-focused:focus-ring [.text-message+&amp;]:mt-1\" data-turn-start-message=\"true\" tabindex=\"0\">\n<div class=\"flex w-full flex-col gap-1 empty:hidden\">\n<div class=\"fbskMG_root markdown prose dark:prose-invert wrap-break-word w-full light markdown-new-styling\">\n<ul data-start=\"0\" data-end=\"1090\" data-is-last-node=\"\" data-is-only-node=\"\">\n<li data-section-id=\"we0anj\" data-start=\"0\" data-end=\"77\">Thermal and magnetron deposition chambers manufactured to UHV standards<span aria-hidden=\"true\" class=\"PDq2pG_selectionAnchor\"><\/span><\/li>\n<li data-section-id=\"tkl5mr\" data-start=\"79\" data-end=\"179\">Allows the installation of up to four thermal evaporators and up to four magnetron sources<\/li>\n<li data-section-id=\"3c46n\" data-start=\"180\" data-end=\"281\">Load-lock chamber for introducing samples at atmospheric pressure or using a transfer container<\/li>\n<li data-section-id=\"osmory\" data-start=\"282\" data-end=\"392\">Linear transfer mechanism for transporting samples from the load-lock chamber to the deposition chambers<\/li>\n<li data-section-id=\"1gytq2w\" data-start=\"393\" data-end=\"463\">Layer thickness control using quartz crystal microbalances (QCMs)<\/li>\n<li data-section-id=\"1rmgwn9\" data-start=\"464\" data-end=\"505\">Ability to heat samples up to 400\u00b0C<\/li>\n<li data-section-id=\"1qwvesr\" data-start=\"506\" data-end=\"601\">Sample mounting station enabling continuous sample rotation during the deposition process<\/li>\n<li data-section-id=\"1iim98y\" data-start=\"602\" data-end=\"915\">A pressure of below 10\u207b\u2076 mbar in the thermal deposition chamber is achieved within 2 hours after venting the chamber with dry air or nitrogen, using a turbomolecular pump with a pumping speed of at least 200 l\/s. The base pressure after baking the chamber at 120\u00b0C for 48 hours is &lt;10\u207b\u2079 mbar<\/li>\n<li data-section-id=\"196vx7q\" data-start=\"916\" data-end=\"1090\" data-is-last-node=\"\">The load-lock chamber can be evacuated using a dry pump to a pressure below 5 \u00d7 10\u207b\u00b2 mbar, or by means of a pumping station equipped with a turbomolecular pump.<\/li>\n<\/ul>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>[\/et_pb_text][\/et_pb_column][et_pb_column type=&#8221;1_2&#8243; _builder_version=&#8221;4.16&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_video src=&#8221;https:\/\/measline.com\/wp-content\/uploads\/2025\/04\/Wysuwanie-nosnika-probek.mp4&#8243; _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;][\/et_pb_video][et_pb_image src=&#8221;https:\/\/measline.com\/wp-content\/uploads\/2026\/09\/IMG_20260822_150746702_HDR-scaled.jpg&#8221; alt=&#8221;System nanoszenia warstw widok z g\u00f3ry&#8221; title_text=&#8221;Img 20260System nanoszenia warstw widok z g\u00f3ry822 150746702 Hdr&#8221; _builder_version=&#8221;4.27.8&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;][\/et_pb_image][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=&#8221;1&#8243; _builder_version=&#8221;4.16&#8243; _module_preset=&#8221;default&#8221; custom_padding=&#8221;30px||||false|false&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_row _builder_version=&#8221;4.16&#8243; _module_preset=&#8221;default&#8221; custom_padding=&#8221;0px||0px||false|false&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_column type=&#8221;4_4&#8243; _builder_version=&#8221;4.16&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_text _builder_version=&#8221;4.27.4&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;]<div class=\"dataTables_scrollHead\">\n<div class=\"dataTables_scrollHeadInner\">\n<h3>Specification:<\/h3>\n<div>\n<table border=\"1\" style=\"border-collapse: collapse; width: 100%; height: 480px;\">\n<tbody>\n<tr style=\"height: 144px;\">\n<td style=\"width: 49.6269%; height: 81px;\"><span>Source of applied material<\/span><\/td>\n<td style=\"width: 50.3731%; height: 81px;\">\n<p><span>Up to four thermal evaporators<\/span><\/p>\n<p><span>Up to four magnetron sources<\/span><\/p>\n<\/td>\n<\/tr>\n<tr style=\"height: 128px;\">\n<td style=\"width: 49.6269%; height: 80px;\"><span>Working temperature of evaporators<\/span><\/td>\n<td style=\"width: 50.3731%; height: 80px;\"><span>up to <\/span>1600<span><span style=\"font-family: Liberation Serif, serif;\">\u00ba<\/span><\/span>C<\/td>\n<\/tr>\n<tr style=\"height: 24px;\">\n<td style=\"width: 49.6269%; height: 24px;\"><span>Crucible volume<\/span><\/td>\n<td style=\"height: 24px; width: 50.3731%;\">5 cm<sup>3 <\/sup><\/td>\n<\/tr>\n<tr style=\"height: 24px;\">\n<td style=\"width: 49.6269%; height: 24px;\"><span>Layer thickness control<\/span><\/td>\n<td style=\"height: 24px; width: 50.3731%;\"><span>quartz scale<\/span><\/td>\n<\/tr>\n<tr style=\"height: 24px;\">\n<td style=\"width: 49.6269%; height: 24px;\"><span>Sample temperature<\/span><\/td>\n<td style=\"height: 24px; width: 50.3731%;\"><span>from room temperature to 400\u00b0C<\/span><\/td>\n<\/tr>\n<tr style=\"height: 80px;\">\n<td style=\"width: 49.6269%; height: 80px;\"><span>Time to obtain vacuum<\/span><\/td>\n<td style=\"height: 80px; width: 50.3731%;\">\n<p align=\"justify\">10<span style=\"font-family: Liberation Serif, serif;\">\u02c9<\/span>\u2076 <span>mbar within 2 hours of chamber aeration<\/span><\/p>\n<\/td>\n<\/tr>\n<tr style=\"height: 167px;\">\n<td style=\"width: 49.6269%; height: 167px;\"><span>Pump system<\/span><\/td>\n<td style=\"height: 167px; width: 50.3731%;\">\n<p>turbomolecular with pumping speed &gt;200 l\/s<\/p>\n<p>dry fore pump with a pumping speed of not less than 5 m\u00b3\/h<\/p>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<div>\n<ul><\/ul>\n<\/div>\n<div>\n<ul><\/ul>\n<\/div>\n<\/div>\n<\/div>[\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=&#8221;4.16&#8243; _module_preset=&#8221;default&#8221; locked=&#8221;off&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_column type=&#8221;4_4&#8243; _builder_version=&#8221;4.16&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_text _builder_version=&#8221;4.27.8&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;]<p><span>See also other thin-layer deposition systems:<br \/><a href=\"https:\/\/measline.com\/index.php\/en-gb\/project\/compact-sputtering-system-lpnw01\/\" target=\"_blank\" rel=\"noopener\">Compact PVD system LPNW01<\/a>\u00a0for thermal deposition of thin layers<br \/><a href=\"https:\/\/measline.com\/index.php\/en-gb\/project\/pvds-700-coating-deposition-system\/\" target=\"_blank\" rel=\"noopener\">PVDS 700 Coating deposition system<\/a>\u00a0for layer deposition with the PVD technique<br \/><a href=\"https:\/\/measline.com\/index.php\/en-gb\/project\/magnetron-system-for-coating-deposition-mcs-787\/\" target=\"_blank\" rel=\"noopener\">Magnetron system for coating deposition MCS 787<\/a>\u00a0equipped with up to four magnetron sources.<br \/><a href=\"https:\/\/measline.com\/index.php\/en-gb\/project\/compact-sputtering-system-for-surface-metallization\/\" target=\"_blank\" rel=\"noopener\">Compact PVD and sputtering system for surface metallization<\/a> with the possibility of thermal and magnetron deposition of layers<\/span><br \/><a href=\"https:\/\/measline.com\/index.php\/en-gb\/project\/pvd-system-with-loading-chamber\/\" target=\"_blank\" rel=\"noopener\">PVD system dedicated to TERS Tip Coating<\/a> <span>designed to accommodate up to<\/span>\u00a0four thermal evaporators<\/p>\n<p>&nbsp;<\/p>\n<p><span><\/span><\/p>[\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section]\n","protected":false},"excerpt":{"rendered":"<p>Thin-layer deposition system with thermal evaporators and magnetronsThe configuration of three vacuum chambers integrated into a single vacuum system is designed for the deposition of thin films of metallic, ceramic, and organic materials using thermal evaporators and magnetron sources. The system is equipped with a load-lock chamber and two rectangular deposition chambers, together with linear-rotary [&hellip;]<\/p>\n","protected":false},"author":2,"featured_media":6124,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_et_pb_use_builder":"on","_et_pb_old_content":"<!-- wp:divi\/placeholder \/-->\n\n<!-- wp:paragraph -->\n<p><\/p>\n<!-- \/wp:paragraph -->","_et_gb_content_width":"","footnotes":""},"project_category":[],"project_tag":[],"class_list":["post-6157","project","type-project","status-publish","has-post-thumbnail","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v28.8 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Thin-layer deposition system with evaporators and magnetrons<\/title>\n<meta name=\"description\" content=\"System for thin-layer deposition using thermal and magnetron methods, complete with a load lock and linear transfer, designe by MeasLine\" \/>\n<meta name=\"robots\" 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