Project Description:
The project aims to develop a solution that enables the investigation of surface reaction mechanisms related to plasma-assisted atomic layer deposition (ALD) processes using a mobile ALD system.
The project is implemented under the funding agreement number. SPPW/MOBIALD/0086/2024-00, within the framework of the “Scientific Research and Innovation” program.
Main objectives of the project:
- Development of a prototype mobile ALD device with in-vacuo sample transfer capability for studies under high and ultra-high vacuum (HV/UHV) conditions.
- Application of the mobile ALD system to perform surface property investigations, including X-ray absorption spectroscopy (X-ray fluorescence and total electron yield measurements) carried out at the Polish synchrotron facility SOLARIS by the AGH University of Krakow, as well as X-ray photoelectron spectroscopy (XPS) studies conducted using AGH’s laboratory-based instruments.
Members of the scientific–industrial consortium:
– Centrum Badań i Rozwoju Technologii dla Przemysłu S.A. (CBRTP)
– AGH University of Krakow
– MeasLine Sp. z o.o.
– EMPA, Swiss Laboratories of Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures
