Vacuum chambers
The chambers designed and manufactured by MeasLine are made to the HV or UHV standard. All chamber parameters, including size, shape, wall thickness, number, and location of flanges, are selected based on the customer’s guidelines. The chambers can be adapted to work at low and high temperatures.
Examples of implementations are presented below.
Vacuum chambers in UHV standard
Vacuum chamber made in UHV standard from 304 L stainless steel.
The interior of the chamber is polished, while the exterior surface is shot blasted. The chamber is equipped with 8 flanges.
Vacuum chambers in UHV standard
The vacuum chamber is made to the UHV standard of 304 L steel, with 3 rotating flanges and the remaining non-rotating flanges.
The inside of the chamber is polished, and the outside surface is matte. All sealing surfaces are polished.
Vacuum chambers in UHV standard
The vacuum chamber is made to the UHV standard of 304 L steel, with 3 rotating flanges and the remaining non-rotating flanges.
The inside of the chamber is polished, and the outside surface is matte. All sealing surfaces are polished.
Thin layer deposition chamber
Rectangular vacuum chamber made to the UHV standard. It is intended for depositing thin layers using up to three magnetron sources introduced from the bottom of the chamber. The remaining flanges make it possible to place substrates for applying layers, gauges, and quartz scales, to connect the pump set, and to install an optical window for the application process inside the chamber observation. The large door provides easy access to the floor holder.
Chamber with external water cooling
High vacuum chamber made in the HV standard from 304 steel with the possibility of external cooling of the chamber walls with water. The design provides easy access to elements mounted outside and to the vacuum equipment installed inside the chamber. The chamber has a rectangular shape. It is equipped with ports adapted to optical windows.
